Multilayered coatings with alternate ZrN and TiAlN superlattices

作者：Li D J; Cao M; Deng X Y; Sun X; Chang W H; Lau W M

来源：Applied Physics Letters, 2007, 91(25): 251908.

DOI：10.1063/1.2826284

ZrN/TiAlN multilayers with various modulation periods and ratios were grown by ion beam assisted deposition. The nanoscale multilayered modulation was confirmed by Auger electron spectroscopy. All multilayers possess higher hardness than the rule-of-mixture value of monolithic coatings. These properties critically depend on both modulation period and ratio. The multilayer with modulation period of 6.5 nm and ratio of 2:3 displays the highest hardness (>30 GPa) and critical fracture load (53.3 mN). These improvements in properties are likely the result of nanoscale strain optimization as the evolution of layer crystallinity finally reaches the formation of (111) textures in all layers.

• 出版日期2007-12-17
• 单位天津师范大学