Deposition of TiN by plasma activated EB-PVD: Activation by thermal electron emission from molten niobium

作者：Peng Hui^*; Zhou Dapeng; Zhang Jiangfeng; Guo Hongbo; Gong Shengkai

来源：Surface and Coatings Technology, 2015, 276: 645-648.

DOI：10.1016/j.surfcoat.2015.05.047

• Electron beam evaporation
• Plasma activation
• Thermal electron emission
• Refractory
• Niobium

This paper presents a new plasma activation process for electron beam evaporation. The plasma is generated by an interaction between the evaporated vapor (serving as anode) and the thermal electrons emitted from molten Nb (serving as cathode). Besides, an arc discharge burning in the anode vapor further enhances the plasma density. This process is demonstrated by means of the plasma activated deposition of TiN coating. Deposition rate of similar to 170 nm/min has been measured. Contamination caused by the slight evaporation of Nb to the coating is similar to 0.1 at%.

• 出版日期2015-8-25
• 单位北京航空航天大学