Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal-Oxide Nanostructures and Nanoarchitectures

作者：Mariotti Davide^*; Bose Arumugam Chandra; Ostrikov Kostya

来源：IEEE Transactions on Plasma Science, 2009, 37(6): 1027-1033.

DOI：10.1109/TPS.2009.2014067

• Atmospheric microplasma (AMP)
• metal-oxide
• molybdenum
• nanofabrication
• nanomanufacturing

In this paper, we report on the fabrication of Mo-oxide nanostructures and nanoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of the process are important characteristics for nanomanufacturing, and AMPS offer such advantages. In addition, AMPS have shown the ability of promoting self-organization of nanostructures.

• 出版日期2009-6
• 单位CSIRO