A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers

作者：Sadeghzadeh Sadegh^*; Kabiri Ali

来源：Applied Mathematical Modelling, 2017, 48: 593-606.

DOI：10.1016/j.apm.2017.04.017

• Hybrid solution
• Micro electromechanical systems
• Pull-in voltage
• Electrostatically-actuated microbeam
• Distributed parameter system

This paper introduces a closed-form approximation of dynamic response of microcantilevers. The applied load on the system was linearized by Taylor series expansion and to obtain approximate solutions, model of a pure odd-order nonlinear oscillator, subjected to constant excitation was assumed. Pull-in voltage was investigated to analyze the different parameters of the examined microbeam. In order to obtain a comprehensive dynamic model for MEMS devices, before, during and after switching, the pure odd-order nonlinear model was combined with a distributed parameter system and solved after reaching the pull-in voltage. The obtained results demonstrate correct prediction of the static pull in voltage and also the dynamic deflection of microbeams. By using the same approach, the sensitivity of the pull-in voltage to various geometrical parameters was also investigated. The obtained results indicate that excessive increase in the air gap causes substantial increase in the pull-in voltage; while increasing thickness of microcantilever has even greater effect. It was also observed that for a given thickness of microcantilever, increasing its length beyond a certain amount has no effect on the pull-in voltage.

• 出版日期2017-8