摘要

Piezoelectric actuators have wide applications because of their indefinite resolution and high stiffness, for use in optical devices, measurement systems and ultra-precision machine tools. In noncircular turning, the tools feeding servo should be long-travel, high-frequency and high-precision. In order to meet these requirements, a new flexure-hinge structure is used to amplify the output displacement of piezoelectric actuators. A hybrid of feed-forward control in the disturbance channel, repetitive control and Proportion and Integration control (PI) are also employed to better the tracking precision and robustness of the system.