科研之友
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摘要
An earlier developed plasma generator based on a nonself-sustained gas discharge with electron injection was modernized and ensured production of gas-metal plasma and, correspondingly, multielement composite (including oxide) coatings with controlled compositions and fractional ratios of components. The characteristics of the discharge system are investigated, and the optimal ways to increase the coating-deposition rate are determined. The device developed stably operates in an oxygen atmosphere for a long service life and is characterized by the absence of a microparticle fraction.
- 出版日期2011-3
