Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

作者：Wang Hongyu; Jiang Wei; Sun Peng^*; Zhao Shuangyun; Li Yuang

来源：Plasma Science and Technology, 2016, 18(2): 143-146.

DOI：10.1088/1009-0630/18/2/08

• CCP
• dual frequency coupling
• PIC/MC

We analyzed perpendicularly configured dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two radio frequency (RF) sources. Particle-in-cell/Monte Carlo (PIC/MC) simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects. Some variation and potential application of the discharging configuration is discussed briefly.

• 出版日期2016-2
• 单位鞍山师范学院; 华中科技大学