A 3D tomographic EBSD analysis of a CVD diamond thin film

作者：Liu Tao^*; Raabe Dierk; Zaefferer Stefan

来源：Science and Technology of Advanced Materials, 2008, 9(3): 035013.

DOI：10.1088/1468-6996/9/3/035013

• CVD diamond films
• nucleation
• growth
• twinning
• dislocation density
• 3D EBSD
• FIB

We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.

• 出版日期2008-9