All-silicon integrated Fabry-Peacuterot cavity for volume refractive index measurement in microfluidic systems

作者：St Gelais R^*; Masson J; Peter Y A

来源：Applied Physics Letters, 2009, 94(24): 243905.

DOI：10.1063/1.3152286

• elemental semiconductors
• Fabry-Perot resonators
• integrated optics
• microfluidics
• optical sensors
• refractive index measurement
• silicon

We report a refractive index (RI) sensor based on the use of vertically etched silicon Bragg reflectors. The device is robust and performs measurements through tens of micrometers of liquid. A sensitivity of 907 nm/RIU (RI units) and a resolution of 1.7x10(-5) RIU are obtained and are in good agreement with optical simulations. This resolution is the highest reported for a volume RI sensor integrated with a microfluidic system. Expected applications for the sensor in the fields of single cell characterization and chip based liquid chromatography are discussed.

• 出版日期2009-6-15