Development of laser ionization mass nanoscope (LIMAS)

作者:Ebata Shingo; Ishihara Morio; Uchino Kiichiro; Itose Satoru; Matsuya Miyuki; Kudo Masato; Bajo Ken ichi; Yurimoto Hisayoshi*
来源:Surface and Interface Analysis, 2012, 44(6): 635-640.
DOI:10.1002/sia.4857

摘要

We have developed a new nano-beam time-of-flight secondary neutral mass spectrometry system: laser ionization mass nanoscope or LIMAS. The primary ion beam column was equipped with a Ga liquid metal ion source and aberration correction optics. The primary ion beam was down to 40?nm in diameter under a current of 100?pA with an energy of 20?keV. The sputtered particles were post-ionized under non-resonance mode by a femtosecond laser. The post-ionized ions were introduced into a multi-turn mass spectrometer. A mass resolution of up to 40?000 was achieved. The vacuum of the sample chamber was maintained under an ultrahigh vacuum of 2?x?10-8?Pa. This instrument would be effective for ultrahigh sensitive analysis of nanosized particles such as return samples from asteroids, comets, and planets.

  • 出版日期2012-6