Application of silica ceramic in precision stage

作者：Lin B^*; Zhang X F; Zhang G L

来源：Optics and Precision Engineering, 2005, 13(1): 73-80.

• Finite element method
• Linear motor
• Precision stage
• Silica ceramic
• Thermal analysis

The temperature rise, deformation, deformation via room temperature change and the time of reaching heat balance of the motion table in precision linear motor driven stage made of steel, aluminum, alumina ceramic and silica ceramic are analyzed. The results show that the temperature rise of silica ceramic with small heat conductivity coefficient decreases clearly. Because of the small thermal expansion coefficient, the deformation of silica ceramic table is small. The thermal stress and deformation of silica ceramic table due to room temperature change are smaller than those of aluminum, steel and alumina ceramic tables. The heat conduction of silica ceramic is slow, so the time of reaching heat balance is long. As a result of the motion table being badly influenced by the primary section of the linear motor in precision linear motor stage, precision stage should choose the material with small heat conductivity coefficient, small thermal expansion coefficient and insensitive to temperature change. Silica ceramic is the suitable ceramic material for these stages.

• 出版日期2005
• 单位天津大学