Determination of aberration center of Ronchigram for automated aberration correctors in scanning transmission electron microscopy

作者：Sannomiya Takumi^*; Sawada Hidetaka; Nakamichi Tomohiro; Hosokawa Fumio; Nakamura Yoshio; Tanishiro Yasumasa; Takayanagi Kunio

来源：Ultramicroscopy, 2013, 135: 71-79.

DOI：10.1016/j.ultramic.2013.05.024

• Transmission electron microscopy
• Scanning transmission electron microscopy
• Aberration
• Cs corrector
• Ronchigram

A generic method to determine the aberration center is established, which can be utilized for aberration calculation and axis alignment for aberration corrected electron microscopes. In this method, decentering induced secondary aberrations from inherent primary aberrations are minimized to find the appropriate axis center. The fitness function to find the optimal decentering vector for the axis was defined as a sum of decentering induced secondary aberrations with properly distributed weight values according to the aberration order. Since the appropriate decentering vector is determined from the aberration values calculated at an arbitrary center axis, only one aberration measurement is in principle required to find the center, resulting in/very fast center search. This approach was tested for the Ronchigram based aberration calculation method for aberration corrected scanning transmission electron microscopy. Both in simulation and in experiments, the center search was confirmed to work well although the convergence to find the best axis becomes slower with larger primary aberrations. Such aberration center determination is expected to fully automatize the aberration correction procedures, which used to require pre-alignment of experienced users. This approach is also applicable to automated aperture positioning.

• 出版日期2013-12