科研之友
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摘要
In this paper the use of shape memory alloy (SMA) wire actuators for high gas flow control is investigated. A theoretical model for effective gas flow control is presented and gate microvalve prototypes are fabricated. The SMA wire actuator demonstrates the robust flow control of more than 1600 sccm at a pressure drop of 200 kPa. The valve can be successfully switched at over 10 Hz and at an actuation power of 90 mW. Compared to the current state-of-the-art high-flow microvalves, the proposed solution benefits from a low-voltage actuator with low overall power consumption. This paper demonstrate that SMA wire actuators are well suited for high-pressurehigh-flow applications.
- 出版日期2012-7
