A novel fast and flexible technique of radical kinetic behaviour investigation based on pallet for plasma evaluation structure and numerical analysis

作者：Malinowski Arkadiusz^*; Takeuchi Takuya; Chen Shang; Suzuki Toshiya; Ishikawa Kenji; Sekine Makoto; Hori Masaru; Lukasiak Lidia; Jakubowski Andrzej

来源：Journal of Physics D: Applied Physics , 2013, 46(26): 265201.

DOI：10.1088/0022-3727/46/26/265201

This paper describes a new, fast, and case-independent technique for sticking coefficient (SC) estimation based on pallet for plasma evaluation (PAPE) structure and numerical analysis. Our approach does not require complicated structure, apparatus, or time-consuming measurements but offers high reliability of data and high flexibility. Thermal analysis is also possible. This technique has been successfully applied to estimation of very low value of SC of hydrogen radicals on chemically amplified ArF 193 nm photoresist (the main goal of this study). Upper bound of our technique has been determined by investigation of SC of fluorine radical on polysilicon (in elevated temperature). Sources of estimation error and ways of its reduction have been also discussed. Results of this study give an insight into the process kinetics, and not only they are helpful in better process understanding but additionally they may serve as parameters in a phenomenological model development for predictive modelling of etching for ultimate CMOS topography simulation.

• 出版日期2013-7-3