A Novel Mass Sensor Based on Nanomechanical Transistor

作者:Jin, Leisheng*; Li, Lijie
来源:IEEE Electron Device Letters, 2015, 36(1): 68-70.
DOI:10.1109/LED.2014.2374693

摘要

A new sensor device based on the principle of the nanomechanical transistor (NMT) is postulated. The sensor consists of two mechanically coupled resonators, of which one is embedded in the NMT as the active resonator, and the other purely acts as the passive sensor. Numerical analysis on the device has been presented using coupled mechanical and charge transfer equations. The results show that high mass sensitivity can be achieved for such devices.