Novel automated microassembly mechanism based on on-chip actuators

作者：Xue Yuan^*; He Siyuan

来源：Journal of Micro/ Nanolithography, Mems, and Moems, 2013, 12(1): 013003.

DOI：10.1117/1.JMM.12.1.013003

• microelectromechanical systems
• automated micro assembly
• repulsive force actuator
• surface-micromachining

The development of a novel automated microassembly mechanism based on on-chip actuators is described. The assembly mechanism utilizes repulsive-force actuators to flip surface-micromachined twodimensional structures out-of-plane and assemble them in a vertical position. The assembly mechanism is suitable for wafer-level multidevice batch assembly without external interference. Prototypes were fabricated using the PolyMUMPs surface micromachining technology, then tested. The strength of the assembled structures in terms of withstanding external acceleration was calculated and experimentally measured. The measured results showed the assembly strength of 7 g for prototype 1 and 8 to 11 g for prototype 2.

• 出版日期2013-3