A methodology for the fabrication by FIB of needle-shape specimens around sub-surface features at the nanometre scale

作者：Hernandez Saz Jesus^*; Herrera Miriam; Molina Sergio I

来源：Micron, 2012, 43(5): 643-650.

DOI：10.1016/j.micron.2011.11.011

• Focused ion beam
• Nano-needle
• Transmission electron microscopy
• Electron tomography
• Semiconductors
• Quantum dot

A novel methodology for the preparation by focused ion beam (FIB) of needle-shape specimens in specific sites underneath the sample surface for their study by electron tomography (ET) is proposed. In particular, we demonstrate this methodology for the fabrication of needles containing InAs/InP quantum dots (QDs). The main challenge of this methodology is the location of specific QDs in the FIB equipment, as they are not visible with the secondary electrons detector. In order to overcome this difficulty, a series of marks visible both in conventional transmission electron microscopy and in the FIB are introduced before the preparation of the needles. The conditions for the fabrication by FIB of needles with optimized characteristics for their study by ET are also detailed.

• 出版日期2012-4