A real-time polishing force control system for ultraprecision finishing of micro-optics

作者：Guo Jiang^*; Suzuki Hirofumi; Morita Shin ya; Yamagata Yutaka; Higuchi Toshiro

来源：Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2013, 37(4): 787-792.

DOI：10.1016/j.precisioneng.2013.01.014

• Ultraprecision finishing
• Polishing force
• Real-time control
• Resolution
• Material removal function

Polishing force condition plays a key role in the ultraprecision finishing of micro-optics because it strongly affects the polishing performance. In this paper, a novel polishing force control system is developed to improve the polishing stability. It is proposed for the first time to precisely control polishing force in real-time and has a simple mechanism which mainly composes of a load cell, a piezo stage and a linear stage. The load cell is used to measure the polishing force, whereas the piezo-stage is applied to adjust the force with nano/micro positioning change. The linear stage driven by a stepper motor is employed to prevent force change beyond the travel range of piezo stage which leads to the system out of control. A PID controller is adopted to calculate the command voltage for driving the piezo-stage based on the measured force. The system enables polishing force to be controlled within a range of 0-200 mN with a resolution of 0.1 mN. Some fundamental experiments are conducted to evaluate the performance of newly developed system. The results indicate that the proposed polishing force control system enables a stable polishing, and the polishing force conditions which generate suitable material removal function are acquired.

• 出版日期2013-10
• 单位RIKEN