Microstructure and Electrical Property of TiNx Films Deposited by DC Reactive Magnetron Sputtering Superimposed Electromagnetic Field System

作者：Park Ji Bong; Kim Jung Hyuk; Cho Sang Hyun; Kang Chung Gil; Song Pung Keun^*

来源：Journal of Nanoscience and Nanotechnology, 2012, 12(2): 1284-1287.

DOI：10.1166/jnn.2012.4600

• TiN
• Electromagnetic Field
• Reactive Magnetron Sputtering
• High Density Plasma

TiNx films were successfully deposited by DC reactive magnetron sputtering superimposed EMF system without substrate heating. In case of DCMS 400 W + EMF 25 W, electrical property, reflectance and crystallinity of the TiN films were clearly improved by the enhancement of nitrification. The lowest sheet resistance of 2.9 Omega/square (resistivity 5.8 x 10(-5) Omega cm) was observed for the film deposited at F-N2: 16%. Mixture phases of the (111) plane and (200) plane showed lower resistivity than only (200) single phase. Therefore it is confirmed that introduction of EMF system is promising technology to deposit TiN film.

• 出版日期2012-2