Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure

作者：Mu Yang; Zhang Xiaoman; Hutchinson J W; Meng W J^*

来源：MRS Communications, 2016, 6(3): 289-294.

DOI：10.1557/mrc.2016.20

Axial compression was conducted on micro-pillars, in which polycrystalline Cu thin films were sandwiched between CrN and Si. Plastic flow of Cu was achieved, when the Cu films are inclined either at 90 degrees or 45 degrees with respect to the pillar axis. The texture of Cu films was altered by changing the template on which film growth occurred. The Cu microstructure was further altered by post-deposition annealing. The flow stress shows little dependence on the film texture in the as-deposited state. However, annealing influences the flow stress of confined Cu films significantly. The implications on strain gradient plasticity models are discussed.

• 出版日期2016-9