科研之友
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摘要
In this paper, we introduce a compact measuring system, to analyze microstructure force property. The system is specially designed in which a mechanical test machine, a PCB board based on an USB connection for device driving and data collection, and processing software were contained. This system can be used for measuring deformation characteristics of MEMS structures by bending method. To confirm the feasibility of the system, an experiment was performed on a micro pillar.
- 出版日期2008
- 单位北京工业大学
