A micro electromagnetic low level vibration energy harvester based on MEMS technology

作者：Wang, Peihong; Tanaka, Katsuhiko; Sugiyama, Susumu; Dai, Xuhan^*; Zhao, Xiaolin; Liu, Jingquan

来源：Microsystem Technologies, 2009, 15(6): 941-951.

DOI：10.1007/s00542-009-0827-0

• Ambient vibrations
• Electromagnetic vibrations
• Electroplated copper
• High aspect ratio
• Low-level vibration
• Mechanical simulations
• Micromachining technologies
• Resonant vibrations

This paper presents a micro electromagnetic energy harvester which can convert low level vibration energy to electrical power. It mainly consists of an electroplated copper planar spring, a permanent magnet and a copper planar coil with high aspect ratio. Mechanical simulation shows that the natural frequency of the magnet-spring system is 94.5 Hz. The resonant vibration amplitude of the magnet is 259.1 mu m when the input vibration amplitude is 14 mu m and the magnet-spring system is at resonance. Electromagnetic simulation shows that the linewidth and the turns of the coil influence the induced voltage greatly. The optimized electromagnetic vibration energy harvester can generate 0.7 mu W of maximal output power with peak-peak voltage of 42.6 mV in an input vibration frequency of 94.5 Hz and input acceleration of 4.94 m/s(2) (this vibration is a kind of low level ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. The testing results show that the prototype can generate induced voltage (peak-peak) of 18 mV and output power of 0.61 mu W for 14.9 m/s(2) external acceleration at its resonant frequency of 55 Hz (this vibration is not in a low ambient vibration level).

• 出版日期2009-6
• 单位上海交通大学; 安徽大学