Advances in engineering nanometrology at the National Physical Laboratory

作者：Leach Richard K^*; Claverley James; Giusca Claudiu; Jones Christopher W; Nimishakavi Lakshmi; Sun Wenjuan; Tedaldi Matthew; Yacoot Andrew

来源：Measurement Science and Technology, 2012, 23(7): 074002.

DOI：10.1088/0957-0233/23/7/074002

• engineering nanometrology
• areal surface topography
• micro-CMM
• x-ray computed tomography
• low force
• atomic force microscopy
• displacement interferometry

The National Physical Laboratory, UK, has been active in the field of engineering nanometrology for a number of years. A summary of progress over the last five years is presented in this paper and the following research projects discussed in detail. (1) Development of an infrastructure for the calibration of instruments for measuring areal surface topography, along with the development of areal software measurement standards. This work comprises the use of the optical transfer function and a technique for the simultaneous measurement of topography and the phase change on reflection, allowing composite materials to be measured. (2) Development of a vibrating micro-CMM probe with isotropic probing reaction and the ability to operate in a non-contact mode. (3) A review of x-ray computed tomography and its use in dimensional metrology. (4) The further development of a metrology infrastructure for atomic force microscopy and the development of an instrument for the measurement of the effect of the probe-surface interaction. (5) Traceable measurement of displacement using optical and x-ray interferometry to picometre accuracy. (6) Development of an infrastructure for low-force metrology, including the development of appropriate transfer artefacts.

• 出版日期2012-7