Pulsed laser deposition of epitaxial MgO buffer layer for proton-conducting ceramic electrolytes

作者：Li Yong; Wong Lai Mun; Xie Hanlin; Wang Shijie; Su Pei Chen^*

来源：Surface and Coatings Technology, 2017, 320: 339-343.

DOI：10.1016/j.surfcoat.2016.12.052

• Pulsed laser deposition (PLD)
• Epitaxial MgO thin film
• Buffer layer
• Yttria-doped barium zirconate (BZY)

This work studies the deposition of epitaxial MgO thin films with thickness of 40 nm deposited on bare Si (100) wafer using pulsed laser deposition (PLD), which can serve as a buffer layer for subsequent growth of textured YBaZrO3 with high proton-conductivity. The success of epitaxial deposition were achieved by careful preparation of Si substrate by pre-etching with HF solution, as well as by optimizing deposition parameters including oxygen partial pressure and substrate temperatures. Epitaxial (100) MgO film with cubic lattice structure and the lattice constant of 4.21 angstrom were obtained, which showed highly lattice match with Y-BaZrO3 perovskite of 4.21 A.

• 出版日期2017-6-25
• 单位南阳理工学院