Absolute Densities of N-2(A(3)Sigma(+)(u)), N(S-4(o)), and N(D-2(o)) in an Inductively Coupled Nitrogen Plasma Source

作者：Horikawa Yoshimine^*; Kurihara Kazuaki; Sasaki Koichi

来源：Japanese Journal of Applied Physics, 2010, 49(2): UNSP 026101.

DOI：10.1143/JJAP.49.026101

The absolute densities of N-2(A(3)Sigma(+)(u)), N(S-4(o)), and N(D-2(o)) in an inductively coupled nitrogen plasma source were measured by cavity-ringdown and vacuum-ultraviolet absorption spectroscopies. It was found that the densities of the above three active species were on the same order of 10(17) m(-3). We observed the decrease in N-2(A(3)Sigma(+)(u)) density with increasing discharge pressure, while N(S-4(o)) and N(D-2(o)) densities increased with discharge pressure. Although the estimation of loss frequency suggested the loss of N-2(A(3)Sigma(+)(u)) due to collisional quenching, it was difficult to identify the dominant loss process quantitatively on the basis of the absolute densities and relevant reaction rate coefficients.

• 出版日期2010