Double functional films with UV absorption and transparent conduction deposited on glass by radio-frequency magnetron sputtering

作者：Ni Jiamiao^*; Zhao Qingnan; Wang Peng; Zhao Xiujian

来源：Journal of the Chinese Ceramic Society, 2006, 34(10): 1182-1186.

• Antimony doped stannic oxide
• Conduction glass
• Radio frequency magnetron sputtering
• Ultraviolet (UV) cutoff

SnO2:Sb(6%, in mole) target, and a series of CeO2-TiO2 targets with different molar ratios of CeO2 to TiO2 were prepared. By using these targets, CeO2-TiO2 films and CeO2-TiO2/SnO2:Sb films were deposited on soda-lime glass substrates by radio frequency magnetron sputtering. The CeO2-TiO2 films were characterized by ultraviolet (UV)-visible transmission spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray diffraction. The results show that the structure of the CeO2-TiO2 films, deposited with the n(CeO2):n(TiO2) = 0.5:0.5 and 0.6:0.4 targets, appears amorphous phases, and has high UV absorption(average value > 99%), and high visible light transmission (average value>80%). There are Ce3-, Ce4- and Ti4+ on the surface of the films. The CeO2-TiO2/SnO2:Sb double films show high UV absorption(average value>99%), high visible light transmission (average value>75%), as well as good conductivity.

• 出版日期2006
• 单位武汉理工大学