Direct synthesis of single-walled carbon nanotubes selectively suspended on tips of vertically aligned silicon nanostructures fabricated by hydrogen plasma etching

作者：Weng Cheng Hui; Su Huan Chieh; Yang Chao Shun; Shin Kun Ying; Leou Keh Chyang^*; Tsai Chuen Horng

来源：Nanotechnology, 2006, 17(22): 5644-5651.

DOI：10.1088/0957-4484/17/22/019

Here we present a method to synthesize single-walled carbon nanotubes ( SWNTs) selectively suspended on tips of silicon-based nanostructure ( Si-ns) templates. The Si-ns templates vertically aligned to the substrates are fabricated via an anisotropic etch process using reactive hydrogen plasmas, in which the etch-resistive nanomasks are the nanosized particles formed by thermal annealing of multi-layered catalytic thin films. After plasma etching, the nanosized self-masks remaining at the tips of the Si-ns directly serve as the catalysts for SWNT growth by thermal chemical vapour deposition. Consequently, the synthesized SWNTs are selectively suspended on the tips of the Si-ns, as revealed by characterizations using scanning electron microscopy and resonance Raman spectroscopy. This methodology provides a simple and straightforward approach to assemble two different nanomaterials, i.e., Si-ns and suspended SWNTs, together as a building block for constructing nanodevices for possible applications.

• 出版日期2006-11-28
• 单位清华大学