Deposition of Copper Oxide Coatings with an Atmospheric Pressure Plasma Source: II - Characterization of the Films

作者:Gruenwald Johannes; Fricke Katja; Froehlich Maik; Kolb Juergen F; Polak Martin
来源:Plasma Processes and Polymers, 2016, 13(8): 766-774.
DOI:10.1002/ppap.201600047