科研之友
微信
新浪微博
Facebook
分享链接
摘要
We compare Balmer-alpha (H-alpha) and Balmer-beta (H-beta) emissions from high-power (1.0-6.0 kW) hydrogen inductively coupled plasmas (ICPs), and propose region I (0.0-2.0 kW), region II (2.0-5.0 kW), and region III (5.0-6.0 kW). In region I, both H a emission intensity (I-alpha) and H-beta emission intensity (I-beta) increase with radio frequency (RF) power, which is explained by the corona model and Boltzmann's law, etc. However, in region II, I-alpha almost remains constant while I-beta rapidly achieves its maximum value. In region III, I a slightly increases with RF power, while I-beta decreases with RF power, which deviates significantly from the theoretical explanation for the H-alpha and H-beta emissions in region I. It is suggested that two strong electric fields are generated in high-power (2.0-6.0 kW) hydrogen ICPs: one is due to the external electric field of high-power RF discharge, and the other one is due to the micro electric field of the ions and electrons around the exited state hydrogen atoms in ICPs. Therefore, the strong Stark effect can play an important role in explaining the experimental results.
