摘要

For high precise laser systems like laser gyro, gravitational waves interferometers, the optical components which lie in the cavity or laser path need to control the total loss, scattering, reflection, absorption, and so on. Low loss high-reflection (HR) and antireflection (AR) coating mirrors are their key components and their aging optical properties are the most important performance parameters for long operating lifetime. Low loss AR coatings on quartz substrates for He-Ne laser are designed and manufactured by ion beam sputtering (IBS) technology. Ta2O5 and SiO2 are used as high and low refractive index materials and the obtained total optical loss of AR coating is less than 50 ppm. Aging optical properties of AR coatings are investigated as a function of time placed in the air. When the placed time exceeds 40 days, optical properties tend to be stabilization. The obtained results indicate that the prepared low loss AR coatings have good stability of optical properties and can be applied for high precise laser systems.

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