Microwave Properties of MAPTMS Sol-Gel Films for High-Speed Electrooptic Devices

作者：Demir V^*; Voorakaranam R; Himmelhuber R; Herrera Oscar D; Norwood R A; Peyghambarian N

来源：IEEE Transactions on Microwave Theory and Techniques, 2014, 62(8): 1599-1604.

DOI：10.1109/TMTT.2014.2331619

• Coplanar waveguide (CPW)
• dielectric material
• dielectric measurement
• electrooptic (EO)

This paper measures the dielectric constant and loss tangent of methacryloyloxy-propyltrimethoxysilane (MAPTMS) sol-gel films over a wide range of microwave frequencies. Samples were prepared by spin-coating sol-gel films onto metallized borosilicate glass substrates. The dielectric properties of the sol-gel were probed up to 50 GHz with several different sets of coplanar wave-guide transmission lines electroplated onto sol-gel films. The dielectric constant and loss tangent are determined to be approximately 3.1 and 3 x 10(-3) at 35 GHz, respectively. This demonstration shows that MAPTMS sol-gel is a viable material for integration with high-speed electrical and electrooptic devices.

• 出版日期2014-8