Atomic Layer Deposition of Zinc Oxide on Multiwalled Carbon Nanotubes for UV Photodetector Applications

作者：Lin Yu Hung^*; Lee Po Sheng; Hsueh Yang Chih; Pan Ko Ying; Kei Chi Chung; Chan Ming Hui; Wu Jyh Ming; Perng Tsong Pyng; Shih Han C

来源：Journal of the Electrochemical Society, 2011, 158(2): K24-K27.

DOI：10.1149/1.3522764

A novel process for the fabrication of ZnO-carbon nanotubes (CNT) nanocomposites with high uniformity by atomic layer deposition (ALD) of ZnO on multiwalled carbon nanotubes was reported, and their applications in UV photodetectors were investigated. Two types of photodetectors, p-and n-type, were developed by alternating the ALD reaction cycles. In addition, a schematic model was proposed to explain the p-to n-type conversion of the ZnO-CNTs, which accounts for the amount and surface coverage of ZnO on CNTs.

• 出版日期2011
• 单位清华大学