摘要

A novel ultra-wideband (0.045-50-GHz) digital and analog compatible monolithic microwave integrated circuit (MMIC) variable attenuator with a low insertion phase shift and large dynamic range is presented. Based on our special design of both the series metal-semiconductor field-effect transistor (MESFET) and shunt MESFET control feeders, the MMIC possesses the feature of excellent return loss characteristic. Also, phase compensation techniques were used in the MMIC design to reduce the insertion phase shift when the attenuation varies. On-wafer measurement results of the developed MMIC chips in the 0.045-50-GHz band are minimum attenuation 2.0-4.0 dB, and maximum attenuation > 70 dB, input and output VSWR <= 1.8 for all attenuation states; low maximum insertion phase shift of 0.86 <= +/-degrees within 70-dB attenuation range. The chip size is 3.68 mm x 1.58 nun x 0.1 mm.