ALD TiOx as a top-gate dielectric and passivation layer for InGaZnO115 ISFETs

作者：Pavlidis S; Bayraktaroglu B; Leedy K; Henderson W; Vogel E; Brand O^*

来源：Semiconductor Science and Technology, 2017, 32(11): 114004.

DOI：10.1088/1361-6641/aa8b33

• InGaZnO
• thin film transistor
• chemical sensing
• ISFET
• passivation
• ALD
• TiOx

The suitability of atomic layer deposited (ALD) titanium oxide (TiOx) as a top gate dielectric and passivation layer for indium gallium zinc oxide (InGaZnO115) ion sensitive field effect transistors (ISFETs) is investigated. TiOx is an attractive barrier material, but reports of its use for InGaZnO thin film transistor (TFT) passivation have been conflicting thus far. In this work, it is found that the passivated TFT's behavior depends on the TiOx deposition temperature, affecting critical device characteristics such as threshold voltage, field-effect mobility and sub-threshold swing. An O-2 annealing step is required to recover TFT performance post passivation. It is also observed that the positive bias stress response of the passivated TFTs improves compared the original bare device. Secondary ion mass spectroscopy excludes the effects of hydrogen doping and inter-diffusion as sources of the temperature-dependent performance change, therefore indicating that oxygen gettering induced by TiOx passivation is the likely source of oxygen vacancies and, consequently, carriers in the InGaZnO film. It is also shown that potentiometric sensing using ALD TiOx exhibits a near Nernstian response to pH change, as well as minimizes V-TH drift in TiOx passivated InGaZnO TFTs immersed in an acidic liquid. These results add to the understanding of InGaZnO passivation effects and underscore the potential for low-temperature fabricated InGaZnO ISFETs to be used as high-performance mobile chemical sensors.

• 出版日期2017-11