Development of N plus in P pixel sensors for a high-luminosity large hadron collider

作者：Kamada Shintaro^*; Yamamura Kazuhisa; Unno Yoshinobu; Ikegami Yoichi

来源：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2014, 765: 118-124.

DOI：10.1016/j.nima.2014.05.029

• ATLAS
• Pixel
• N plus in p
• Slim edge
• Al2O3
• Edge spark

Hamamatsu Photonics K. K. is developing an N+ in a p planar pixel sensor with high radiation tolerance for the high-luminosity large hadron collider (HL-LHC). The N+ in the p planar pixel sensor is a candidate for the HL-LHC and offers the advantages of high radiation tolerance at a reasonable price compared with the N+ in an n planar sensor, the three-dimensional sensor, and the diamond sensor. However, the N+ in the p planar pixel sensor still presents some problems that need to be solved, such as its slim edge and the danger of sparks between the sensor and readout integrated circuit. We are now attempting to solve these problems with wafer-level processes, which is important for mass production. To date, we have obtained a 250-mu m edge with an applied bias voltage 011000 V. To protect against high-voltage sparks from the edge, we suggest some possible designs for the N+ edge.

• 出版日期2014-11-21