Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition

作者：Shin Jung Ho; Choi Kwang Soo; Wang Tie gang; Kim Kwang Ho^*; Nowak Roman

来源：Transactions of Nonferrous Metals Society of China, 2012, 22: S722-S728.

DOI：10.1016/S1003-6326(12)61794-4

• Ti-B-N coating
• plasma-enhanced chemical vapor deposition (PECVD)
• nanocomposite coating
• hardness
• friction coefficient

Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4, BCl3, H-2, N-2, and Ar. By virtue of X-ray diffraction analysis, X-ray photoelectron spectroscopy, scanning electron microscope, and high-resolution transmission electron microscope, the influences of B content on the microstructure and properties of Ti-B-N coatings were investigated systematically. The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase. With increasing B content and decreasing N content in the coatings, the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2/a-BN via FCC-TiN+HCP-TiB2/a-BN. The highest microhardness of about 34 GPa is achieved, which corresponds to the nanocomposite Ti-63% B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase. The lowest friction-coefficient was observed for the nanocomposite Ti-41% B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN phase.

• 出版日期2012-12
• 单位中国科学院金属研究所