Methods and instrumentation for piezoelectric motors

作者：Drevniok B^*; Paul W M P; Hairsine K R; McLean A B

来源：Review of Scientific Instruments, 2012, 83(3): 033706.

DOI：10.1063/1.3694972

Because of their compact form factor and rigidity, piezoelectric motors are used in scanning probe microscopes that operate at low temperature and high magnetic field. Here we present detailed information to facilitate the assembly, operation, and characterization of inertial motors. Specifically, a model of the motor is developed and used to identify different regions of operation. Drive electronics with high slew rate and large output current are described and a step-by-step procedure for assembling piezoelectric shear stacks is detailed. Additionally, a novel reflective object sensor is described and used to characterize a Pan-style inertial motor that was designed and assembled using the concepts presented in this paper.

• 出版日期2012-3