Atomistic simulations of diamond-like carbon growth

作者：Joe Minwoong; Moon Myoung Woon; Lee Kwang Ryeol^*

来源：Thin Solid Films, 2012, 521: 239-244.

DOI：10.1016/j.tsf.2011.11.060

• Molecular dynamics
• Diamond-like carbon
• Amorphous carbon
• Subplantation
• Thermal spike
• Surface roughening

Diamond-like carbon (DLC) films are composed of carbon bonds with different hybridizations, including sp(2), sp(3) and even sp(1). Understanding the atomic bonding structure is essential to understanding the properties and optimizing the process parameters of the films. Because of the limited analytical tools for characterizing the atomic bonding structure in amorphous materials, computational research at the atomistic scale could provide significant insight into the structure-property relationships in diamond-like carbon films and has been applied to understanding the various phenomena occurring during DLC film growth. The contributions of the atomistic simulations and electronic structure calculations pertain mainly to three important issues: (i) the sp(3) bond formation and stress generation mechanisms, (ii) the stress reduction mechanism by metal incorporation, and (iii) the impact angle-dependent surface smoothening/roughening mechanisms.

• 出版日期2012-10-30