科研之友
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摘要
The design, fabrication and detailed characterization of a fully electroplated, magnetostatic low-cost MEMS scanning mirror are presented. By electroplating bright nickel on a sacrificial substrate, robust soft-magnetic micromirrors may be fabricated. The technology is simpler and cheaper than the standard process using bulk silicon micromachining of silicon-on-insulator wafers for fabricating magnetostatic scanners. The presented Ni mirrors exhibit deflection angles of +/- 7 degrees at resonance for small external magnetic fields of 0.23 mT. Such magnetic fields are easily generated by miniaturized solenoids, making integration, for instance, into endoscopic systems possible.
- 出版日期2012-12
