Absolutely determined inelastic mean free paths for 300-3000 eV electrons in 10 elemental solids

作者：Nagatomi T^*; Tanuma S; Goto K

来源：Surface and Interface Analysis, 2010, 42(10-11): 1537-1540.

DOI：10.1002/sia.3570

• inelastic mean free path
• surface excitation parameter
• electron

The inelastic mean free path (IMFP), surface excitation parameter (SEP), and differential SEP (DSEP) were determined for 10 elemental solids by the absolute analysis of reflection electron energy loss spectra (REELS). The obtained IMFPs were compared with values calculated using predictive equations for the IMFP, and it is found that the obtained IMFPs show a fairly good agreement with those calculated by the TPP-2M predictive equation. The obtained IMFPs were analyzed by the Fano plot and fitted to the Bethe equation, revealing that the obtained IMFPs are well described by the Bethe equation. The obtained DSEPs were compared with the theoretically calculated DSEPs, and the reasonable agreement between the present and theoretical DSEPs was confirmed. The dependence of the present SEPs on the electron energy is found to be described well by predictive equations for the SEP, and material parameters in the predictive equations were determined.

• 出版日期2010-11