Fabrication of anodized aluminum oxide membrane with nanometer pores

作者：Zhang ZF; Yang XW; Zhao YC; Chen QH; Sun JS

来源：Transactions of Nonferrous Metals Society of China, 2003, 13(2): 298-301.

• anodized aluminum oxide
• nanopore
• phosphoric acid
• membrane
• alloying element
• annealing

The pure aluminum and Al-Mg-Mn alloy were anodized in 4%, 10% and 18.5% phosphoric acid solution, respectively. As for pure Al, the maximum thickness of anodized aluminum oxide (AAO) membrane, 216 nm, is obtained by being anodized in 4% solution. Its average pore diameter is around 70 nm, and pore density exceeds 10(10)/cm(2). Under the same technology condition, the membrane thickness decreases with increment of electrolyte content. TEM images show that element Mg or Mn added into aluminum alloy can damage the integration of AAO membrane. During anodizing of aluminum, the formed oxide layer is amorphous. After being annealed at 600degreesC for 24 h, it is still amorphous. However, when membrane is annealed at 930 V, the amorphous oxide begins to transform to gamma-Al2O3.

• 出版日期2003-4
• 单位昆明学院