Alumina Ceramic Based High-Temperature Performance of Wireless Passive Pressure Sensor

作者：Wang, Bo; Wu, Guozhu^*; Guo, Tao; Tan, Qiulin

来源：Photonic Sensors, 2016, 6(4): 328-332.

DOI：10.1007/s13320-016-0313-0

• Pressure sensor
• wireless passive
• high temperature
• zero drift
• resonant frequency

A wireless passive pressure sensor equivalent to inductive-capacitive (LC) resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/degrees C when the temperature changes from 27 degrees C to 700 degrees C and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.

• 出版日期2016-12
• 单位中北大学