Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

作者：Hsieh Tung Hsien^*; Jywe Wen Yuh; Chen Shang Liang; Liu Chien Hung; Huang Hsueh Liang

来源：Review of Scientific Instruments, 2011, 82(5): 056101.

DOI：10.1063/1.3585021

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is +/-30nm/200 nm and +/-0.04 arcsec/0.1 arcsec at 1000 Hz.

• 出版日期2011-5