Accurate and simple assembly process of shape memory alloy tubular micro manipulator with a bias mechanism

作者：Mineta Takashi^*; Kudoh Shinya; Makino Eiji; Kawashima Takahiro; Shibata Takayuki

来源：Microelectronic Engineering, 2011, 88(8): 2683-2686.

DOI：10.1016/j.mee.2011.02.031

• Shape memory alloy tube
• Micro manipulator
• Accurate assembly
• Tubular bias mechanism

This paper describes the fabrication and assembly of a tubular micro manipulator consisting of a TiNiCu shape memory alloy (SMA) actuator with a coaxial tubular bias mechanism of a TiNi super elasticity alloy. The TiNiCu actuator has meandering shaped springs connected to joint rings (O.D.: 970 mu m, I.D.: 910 mu m) in which a bias mechanism is inserted. To simplify the assembly process, the joint rings have an extendable structure to facilitate insertion of the tubular bias mechanism (O.D.: 900 mu m) into the former. Subsequently, the joint rings are locally heated to shrink and clamp the bias spring. The extension and shrinking process facilitated the highly accurate assembly of the tubular SMA manipulator with the bias spring. The assembled manipulator was also strong enough to resist fracture during the bending operation following actuation of the SMA meandering springs.

• 出版日期2011-8