Measuring multielectron beam imaging fidelity with a signal-to-noise ratio analysis

作者:Mukhtar Maseeh; Bunday Benjamin D; Quoi Kathy; Malloy Matt; Thiel Brad
来源:Journal of Micro/ Nanolithography, Mems, and Moems, 2016, 15(3): 034004.
DOI:10.1117/1.JMM.15.3.034004