Automatic centroid detection and surface measurement with a digital Shack-Hartmann wavefront sensor

作者：Yin Xiaoming^*; Zhao Liping; Li Xiang; Fang Zhongping

来源：Measurement Science and Technology, 2010, 21(1): 015304.

DOI：10.1088/0957-0233/21/1/015304

• digital Shack-Hartmann wavefront sensor
• centroid detection
• surface measurement
• on-line inspection

With the breakthrough of manufacturing technologies, the measurement of surface profiles is becoming a big issue. A Shack-Hartmann wavefront sensor (SHWS) provides a promising technology for non-contact surface measurement with a number of advantages over interferometry. The SHWS splits the incident wavefront into many subsections and transfers the distorted wavefront detection into the centroid measurement. So the accuracy of the centroid measurement determines the accuracy of the SHWS. In this paper, we have presented a new centroid measurement algorithm based on an adaptive thresholding and dynamic windowing method by utilizing image-processing techniques. Based on this centroid detection method, we have developed a digital SHWS system which can automatically detect centroids of focal spots, reconstruct the wavefront and measure the 3D profile of the surface. The system has been tested with various simulated and real surfaces such as flat surfaces, spherical and aspherical surfaces as well as deformable surfaces. The experimental results demonstrate that the system has good accuracy, repeatability and immunity to optical misalignment. The system is also suitable for on-line applications of surface measurement.

• 出版日期2010-1