摘要

The tilt between sample surface and indenter is the premise for taking into consideration the effect of sample tilt on indentation measurement by some correction functions. A theoretical approach is proposed to measure the tilt angle and rotation angle of a tilted sample by the residual imprint morphology of the Berkovich indenter. The tilt angle and rotation angle are defined in the Cartesian coordinate system at the tip of the Berkovich indenter, which is ideal and whose axis is along the vertical direction. The normal of the sample surface can be calculated with unique solutions by solving the equations with the projected contact lengths of indenter edges as input values, which can be measured directly from the residual imprint after indentation. Tilt angle and rotation angle can be calculated from sample surface normal.