A new experimental approach for evaluating the mechanical integrity of interfaces between hard coatings and substrates

作者：Chen Ke; Mu Yang; Meng W J^*

来源：MRS Communications, 2014, 4(1): 19-23.

DOI：10.1557/mrc.2014.3

We describe a new protocol for testing coating/substrate interfacial failures through compression loading of micro-pillars containing an inclined interface region, experimentally realized in the TiN/Ti/Si(100) system. Interfacial failures were achieved through direct compression loading in the axial direction, which yielded reproducible failure stresses which exhibited little dependence on the pillar diameter. The testing protocol lends itself to high-resolution analysis of failure surfaces, and is conducive to correlating interfacial structure and chemistry with mechanical failures within the coating/substrate interfacial region.

• 出版日期2014-4