Analysis and optimization of a micro-displacement sensor for compliant microgripper

作者:Thanh Phong Dao; Nhat Linh Ho; Tan Thang Nguyen; Hieu Giang Le; Pham Toan Thang; Huy Tuan Pham; Hoang Thinh Do; Minh Duc Tran; Trung Thang Nguyen
来源:Microsystem Technologies, 2017, 23(12): 5375-5395.
DOI:10.1007/s00542-017-3378-9