Ultraprecision grinding of tungsten carbide for spherical mirrors

作者：Yin L^*; Vancoille EYJ; Ramesh K; Huang H; Pickering JP; Spowage AC

来源：Proceedings of the Institution of Mechanical Engineers - Part B: Journal of Engineering Manufacture , 2004, 218(4): 419-429.

DOI：10.1243/095440504323055533

• submicrometre form accuracy
• nanometre surface roughness
• spherical mirrors
• tungsten carbide
• ultraprecision grinding
• diamond wheel

This paper reports the ultraprecision grinding of tungsten carbide for spherical mirrors with nanometre surface roughness and submicron form accuracy. Spherical grinding was conducted with a computer numerical control grinding machine using a metal-bond diamond toot with grit size of 15 mum. Form accuracy and surface roughness were investigated as functions of the grinding conditions. Ground tungsten carbide with concave and convex spherical surfaces was obtained with form accuracy in terms of peak-to-valley values of 0.13-0.165 wave (83-104 nm) and surface roughness values smaller than R-a = 5 nm. These surfaces were also characterized with fracture-free morphology. The analyses of microscopic topography of the applied diamond tool showed that self-sharpening of diamond abrasives occurred in grinding. The results show that ultraprecision grinding can be applied to the direct fabrication of spherical mirrors made of tungsten carbide without additional lapping and polishing processes.

• 出版日期2004-4
• 单位天津大学